MW0149 sample: Graphene grown in copper foil (Easy Transfer Graphene by Graphenea Inc.) Substrate: Si/SiO2 wafer - oxide thickness 275 nm sample modification: Annealed in vaccum furnace at 1E-6 mbar and 300 °C for 30 min MW0159 sample: Graphene grown in copper foil (Easy Transfer Graphene by Graphenea Inc.) Substrate: Si/SiO2 wafer - oxide thickness 275 nm sample modification: covered with approx. 300 nm PMMA 950k - exposed to an electron beam (15 keV, 200 pA, various doses) and developed in 2:1 IPA:water MW0160 sample: Graphene grown in copper foil (Easy Transfer Graphene by Graphenea Inc.) Substrate: Si/SiO2 wafer - oxide thickness 275 nm sample modification: covered with transfered PMMA mask and developed in 2:1 IPA:water MW0170 sample: Graphene grown in copper foil (Easy Transfer Graphene by Graphenea Inc.) Substrate: Si/SiO2 wafer - oxide thickness 275 nm sample modification: covered with approx. 300 nm PMMA 950k - exposed to an electron beam (15 keV, 200 pA, various doses) and developed in 2:1 IPA:water Annealed in vaccum furnace at 1E-6 mbar and 300 °C for 30 min