Progress in Sputter Growth of ß-Ga2O3 by Applying Pulsed-Mode Operation

Thumbnail
Files in this item
Date
2020
Author
Schurig, Philipp
Michel, Fabian
Beyer, Andreas
Volz, Kerstin
Becker, Martin
Polity, Angelika
Klar, Peter J.
Metadata
Quotable link
http://dx.doi.org/10.22029/jlupub-6911
Original publication in

Physica status solidi. A, Applied research 217 (2020), 1901009

URI of original publication
https://doi.org/10.1002/pssa.201901009
Collections
Namensnennung - Nicht kommerziell - Keine Bearbeitungen 4.0 International