Progress in Sputter Growth of ß-Ga2O3 by Applying Pulsed-Mode Operation

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Date
2020Author
Schurig, Philipp
Michel, Fabian
Beyer, Andreas
Volz, Kerstin
Becker, Martin
Polity, Angelika
Klar, Peter J.
Quotable link
http://dx.doi.org/10.22029/jlupub-6911Original publication in
Physica status solidi. A, Applied research 217 (2020), 1901009