Optimizing the Stoichiometry of Ga2O3 Grown by RF-Magnetron Sputter Deposition by Correlating Optical Properties and Growth Parameters

Schurig, PhilippPhilippSchurigCouturier, MarcelMarcelCouturierBecker, MartinMartinBeckerPolity, AngelikaAngelikaPolityKlar, Peter JensPeter JensKlar2022-08-252022-08-252019https://jlupub.ub.uni-giessen.de/handle/jlupub/6998http://dx.doi.org/10.22029/jlupub-6449enNamensnennung - Nicht kommerziell - Keine Bearbeitungen 4.0 Internationalddc:530Optimizing the Stoichiometry of Ga2O3 Grown by RF-Magnetron Sputter Deposition by Correlating Optical Properties and Growth Parameters