Raman and profiler data of the samples investigated in the publication Marcel Weinhold and Peter J. Klar "Patterning 2D material for devices by mild lithography". The Raman data is formatted as a standard text file and the profiler data is formatted as asci in tabular form. In addition to the actual data, the files 'Setup_Profiler.txt', ... 'Setup_Raman-Spectroscopy.txt', and 'Samples.txt' serve to explain the names of the individual files and the information they contain, and to describe the measurement setups and samples used in more detail.