Optimizing the Stoichiometry of Ga2O3 Grown by RF-Magnetron Sputter Deposition by Correlating Optical Properties and Growth Parameters
Dateien zu dieser Ressource
Datum
2019Autor
Schurig, Philipp
Couturier, Marcel
Becker, Martin
Polity, Angelika
Klar, Peter Jens
Zitierlink
http://dx.doi.org/10.22029/jlupub-6449Erstpublikation in
Physica status solidi. A, Applied research 216 (2019), 1900385