Optimizing the Stoichiometry of Ga2O3 Grown by RF-Magnetron Sputter Deposition by Correlating Optical Properties and Growth Parameters

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10.1002_pssa.201900385.pdf (765.3Kb)

Date

2019

Author

Schurig, Philipp

Couturier, Marcel

Becker, Martin

Polity, Angelika

Klar, Peter Jens

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http://dx.doi.org/10.22029/jlupub-6449

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Physica status solidi. A, Applied research 216 (2019), 1900385

URI of original publication

https://doi.org/10.1002/pssa.201900385

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